TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Banghard, Michael
A1  - Hartmann, Romy
A1  - Silmy, Kamel
A1  - Nisch, Wilfried
A1  - Metzen, Rene P. von
A1  - Stett, Alfred
A1  - Bucher, Volker
T1  - High voltage insulation properties of DLC-Parylene multilayer films for microsurgery instruments
JF  - Microelectronic Engineering
KW  - High voltage insulation layers
KW  - Minimal invasive surgery
KW  - Medical devices
KW  - DLC PECVD
KW  - Parylene
KW  - Biocompatible and reprocessable
KW  - Layers
Y1  - 2016
SN  - 0167-9317
SS  - 0167-9317
U6  - https://doi.org/10.1016/j.mee.2016.03.057
DO  - https://doi.org/10.1016/j.mee.2016.03.057
VL  - 153.2016
SP  - 126
EP  - 131
ER  -