@article{BauerdickBurkhardtRudorfetal.2003,
  author    = {S. Bauerdick and Claus J. Burkhardt and R. Rudorf and W. Barth and Volker Bucher and Wilfried Nisch},
  title     = {In-situ monitoring of electron beam induced deposition by atomic force microscopy in a scanning electron microscope},
  series   = {Microelectronic Engineering},
  volume    = {67/68.2003},
  number    = {June},
  issn      = {0167-9317},
  doi       = {10.1016/S0167-9317(03)00160-6},
  pages     = {963 -- 969},
  year      = {2003},
  language  = {en}
}