@inproceedings{IvanovKovacsMeschederetal.2009, author = {Alexey Ivanov and Andras Kovacs and Ulrich Mescheder and S. Kuhn and M. K{\"u}bler and A. Burr}, title = {Optimisation of Surface Quality of 3D Silicon Master Forms for Injection Molding of Optical Micro Elements}, series = {MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany}, publisher = {VDE-Verlag}, address = {Berlin}, isbn = {978-3-8007-3183-1}, year = {2009}, language = {en} }