@inproceedings{Mescheder2004,
  author    = {Ulrich Mescheder},
  title     = {Nanoporous Silicon: Multifunctional Material for Microsystems},
  series = {Novel vehicle concepts and emerging vehicle technologies : papers presented at the RTO Applied Vehicle Technology Panel (AVT) symposium held in Brussels, Belgium, 7 - 10 April 2003},
  year      = {2004},
  language  = {en}
}