@inproceedings{MeschederKovacsJonnalagaddaetal.2009,
  author    = {Ulrich Mescheder and Andras Kovacs and Prasad Jonnalagadda and Antwi Nimo},
  title     = {Nanostrukturierte Siliziumoberfl{\"a}chen f{\"u}r Mikro-Nano-Integration},
  series = {MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany},
  isbn      = {978-3-8007-3183-1},
  year      = {2009},
  language  = {de}
}