TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Bucher, Volker A1 - Schubert, Markus A1 - Kern, Dieter A1 - Nisch, Wilfried T1 - Light-addressed sub-μm electrodes for extracellular recording and stimulation of excitable cells JF - Microelectronic Engineering KW - Sub-mm electrode chip KW - Light-addressing KW - Substrate integrated electrodes KW - Amorphous silicon Y1 - 2001 SN - 0167-9317 SS - 0167-9317 U6 - https://doi.org/10.1016/S0167-9317(01)00462-2 DO - https://doi.org/10.1016/S0167-9317(01)00462-2 VL - 57/58.2001 IS - September SP - 705 EP - 712 ER -