TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Bucher, Volker
A1  - Brugger, Jürgen
A1  - Kern, Dieter
A1  - Kim, Gyu M.
A1  - Schubert, Markus
A1  - Nisch, Wilfried
T1  - Electrical properties of light-addressed sub-μm electrodes fabricated by use of nanostencil technology
JF  - Microelectronic Engineering
KW  - Sub-mm electrode chip
KW  - Light-addressing
KW  - Nanostencil
KW  - Shadow mask
Y1  - 2002
SN  - 0167-9317
SS  - 0167-9317
U6  - https://doi.org/10.1016/S0167-9317(02)00422-7
DO  - https://doi.org/10.1016/S0167-9317(02)00422-7
VL  - 61/62.2002
IS  - July
SP  - 971
EP  - 980
ER  -