@article{BucherGrafStelzleetal.1999, author = {Volker Bucher and Michael Graf and Martin Stelzle and Wilfried Nisch}, title = {Low-impedance thin-film polycrystalline silicon microelectrodes for extracellular stimulation and recording}, series = {Biosensors and Bioelectronics}, volume = {14.1999}, number = {7}, issn = {0956-5663}, doi = {10.1016/S0956-5663(99)00037-8}, pages = {639 -- 649}, year = {1999}, language = {en} }