TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Ivanov, Alexey
A1  - Mescheder, Ulrich
A1  - Kröner, M.
A1  - Woias, Peter
T1  - Formation of Arbitrarily Shaped 3D-Forms in Silicon by 315 Electrochemical Wet-Etching
T2  - Technical digest / MME 2008, 19th MicroMechanics Europe Workshop, September 28 - 30, 2008, Aachen, Germany
Y1  - 2008
SN  - 978-3-00-025529-8
SB  - 978-3-00-025529-8
SP  - 315
EP  - 318
S1  - 3
ER  -