TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Mescheder, Ulrich
A1  - Mund, F.
A1  - Huber, H.-L.
T1  - Linewidth metrology for x-ray masks with subhalfmicron feature size
JF  - Microelectronic Engineering
Y1  - 1987
SN  - 0167-9317
SS  - 0167-9317
U6  - https://doi.org/10.1016/0167-9317(87)90101-8
DO  - https://doi.org/10.1016/0167-9317(87)90101-8
VL  - 06.1987
IS  - 1-4
SP  - 653
EP  - 659
ER  -