@article{AzarhoushangSoltaniZahedi2017, author = {Bahman Azarhoushang and Babak Soltani and Ali Zahedi}, title = {Laser-assisted grinding of silicon nitride by picosecond laser}, series = {The International Journal of Advanced Manufacturing Technology}, volume = {93.2017}, number = {5-8}, issn = {1433-3015}, doi = {10.1007/s00170-017-0440-9}, pages = {2517 -- 2529}, year = {2017}, language = {en} }