TY  - CHAP
U1  - Buchbeitrag
A1  - Mescheder, Ulrich
T1  - Modern Silicon-based MEMS Technology
BT  - Proceedings of the NATO Advanced Study Institute on Smart Sensors and MEMS, Povoa de Varzim, Portugal, 8-19 September 2003
T2  - Smart Sensors and MEMS
Y1  - 2003
SN  - 1-4020-2928-4
SB  - 1-4020-2928-4
SP  - 255
EP  - 272
PB  - Kluwer Academic Publishers
CY  - Dordrecht
ER  -