@inproceedings{GauppKeavRychenetal.2018, author = {D. Gaupp and S. Keav and Philippe Rychen and Thomas Oppenl{\"a}nder}, title = {UPUR – A Metal-Free Combination of Several UPW Polishing Steps in a Multifunctional Reactor for the Removal of TOC and H2O2 Traces}, series = {Ultrapure Micro 2018, May 30 - June 1, Austin, Texas, USA}, year = {2018}, language = {en} }