@inproceedings{IvanovMescheder2012,
  author    = {Alexey Ivanov and Ulrich Mescheder},
  title     = {Dynamic Simulation of Electrochemical Etching of Silicon with COMSOL},
  series = {Proceedings COMSOL Conference, Milan, Italy, 10.-12.10.2012},
  year      = {2012},
  language  = {en}
}