TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Albers, Albert A1 - Enkler, Hans-Georg A1 - Leslabay, Pablo T1 - Methods for simulating and optimizing moulded micro components and systems BT - 8th International Workshop on High Aspect Ratio Micro Structure Technology, HARMST 2009, June 25 to 28, Saskatoon, Saskatechwan, Canada JF - Microsystem Technologies Y1 - 2010 SN - 1432-1858 SS - 1432-1858 U6 - https://doi.org/10.1007/s00542-010-1073-1 DO - https://doi.org/10.1007/s00542-010-1073-1 VL - 16.2010 IS - 8 SP - 1517 EP - 1527 ER -