TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Albers, Albert
A1  - Börsting, Peter
A1  - Deigendesch, Tobias
A1  - Enkler, Hans-Georg
A1  - Leslabay, Pablo
T1  - Micro gear validation: improving the correlation between virtual and physical testing
BT  - 8th International Workshop on High Aspect Ratio Micro Structure Technology, HARMST 2009, June 25 to 28, Saskatoon, Saskatechwan, Canada
JF  - Microsystem Technologies
Y1  - 2010
SN  - 1432-1858
SS  - 1432-1858
U6  - https://doi.org/10.1007/s00542-009-0997-9
DO  - https://doi.org/10.1007/s00542-009-0997-9
VL  - 16.2010
IS  - 8
SP  - 1529
EP  - 1535
ER  -