@article{BlendingerMetzgerHaehneletal.2018,
  author    = {Felix Blendinger and Michael Metzger and Daniel H{\"a}hnel and Monika Fleischer and Volker Bucher},
  title     = {In situ Prozess-Visualisierung/Optimierung und Anwendung der Atomlagenabscheidung},
  series   = {WOMag},
  volume    = {7.2018},
  number    = {1-2},
  issn      = {2195-5905},
  pages     = {16 -- 21},
  year      = {2018},
  language  = {de}
}