@article{BuchmannMeschederTorkler1991,
  author    = {L.-M. Buchmann and Ulrich Mescheder and M. Torkler},
  title     = {Characterization of silicon open stencil masks in an ion projection lithography machine},
  series   = {Microelectronic Engineering},
  volume    = {13.1991},
  number    = {1-4},
  issn      = {0167-9317},
  doi       = {10.1016/0167-9317(91)90110-Y},
  pages     = {353 -- 356},
  year      = {1991},
  language  = {en}
}