@inproceedings{MeschederWerner1989,
  author    = {Ulrich Mescheder and K. Werner},
  title     = {Submikrometer Linienbreitenmetrologie hoher Genauigkeit},
  series = {Maskentechnik f{\"u}r Mikroelektronik-Bausteine: Tagungsbericht, M{\"u}nchen, 09. November 1989; VDI-Berichte, 795},
  isbn      = {3-18-090795-9},
  pages     = {155 -- 190},
  year      = {1989},
  language  = {de}
}