@inproceedings{KronastMeschederHuster2009, author = {Wolfgang Kronast and Ulrich Mescheder and Rolf Huster}, title = {Stressuntersuchung und Optimierung von SOI basierten Membranen}, series = {MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany}, publisher = {VDE-Verlag}, address = {Berlin}, isbn = {978-3-8007-3183-1}, year = {2009}, language = {de} }