TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Fürjes, P. A1 - Kovacs, Andras A1 - Dücsö, Cs. A1 - Adam, Maria A1 - Müller, Bernhard A1 - Mescheder, Ulrich T1 - Porous silicon-based humidity sensor with interdigital electrodes and internal heaters JF - Sensors and Actuators B: Chemical KW - Humidity sensor KW - Porous silicon KW - Effective heating Y1 - 2003 SN - 0925-4005 SS - 0925-4005 U6 - https://doi.org/10.1016/S0925-4005(03)00423-4 DO - https://doi.org/10.1016/S0925-4005(03)00423-4 VL - 95.2003 IS - 1-3 SP - 140 EP - 144 ER -