TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Khazi, Isman M.
A1  - Kovacs, Andras
A1  - Mescheder, Ulrich
T1  - Microfabrication of 3D Free-Forms with Textured Surface Morphology in Monocrystalline Silicon using Grayscale Technology
JF  - Journal of Applied Material Science & Engineering Research
KW  - Grayscale lithography
KW  - Direct writing laser
KW  - Reactive ion etching
KW  - Gray scale technology
KW  - 3D free-forms
Y1  - 2020
SN  - 2689-1204
SS  - 2689-1204
U6  - https://doi.org/10.33140/JAMSER.04.04.04
DO  - https://doi.org/10.33140/JAMSER.04.04.04
VL  - 4.2020
IS  - 4
SP  - 150
EP  - 154
ER  -