@article{KovacsMartinFilbertetal.2020,
  author    = {Andras Kovacs and Dagmar Martin and Alexander Filbert and Volker Bucher and Ulrich Mescheder},
  title     = {Single and Multilayer Atomic Layer Deposition on and into Mesoporous Silicon Layers},
  series   = {ECS Transactions},
  volume    = {98.2020},
  number    = {2},
  issn      = {1938-6737},
  doi       = {10.1149/09802.0121ecst},
  pages     = {121 -- 130},
  year      = {2020},
  language  = {en}
}