TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Kintzel, Wolfram
A1  - Schmid, Marvin
A1  - Rentschler, Achim
A1  - Eisenlohr, Jörg
A1  - Bucher, Volker
T1  - Novel method for plasma etching of printed circuit boards as alternative for fluorocarbon gases
JF  - International Journal of Plasma Environmental Science and Technology : ISNTPT
KW  - Printed circuit board
KW  - Plasma etching
KW  - Fluorocarbon
KW  - PCB
KW  - HFC
Y1  - 2023
SN  - 2435-0125
SS  - 2435-0125
U6  - https://doi.org/10.34343/ijpest.2023.17.e02002
DO  - https://doi.org/10.34343/ijpest.2023.17.e02002
VL  - 17.2023
IS  - 2
SP  - 19
S1  - 19
ER  -