TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Müller, Sonja
A1  - Rupitsch, Stefan J.
A1  - Mescheder, Ulrich
T1  - Experimental characterisation of a piezoelectrically actuated force amplifier using optical and self-sensing methods
T2  - ACTUATOR 2022; International Conference and Exhibition on New Actuator Systems and Applications, June 29-30, 2022, Mannheim, Germany
N2  - In this work, we characterise a flexural mechanical amplifier, which is used for the realisation of a miniaturised piezoelectric inchworm motor designed for large force (some N) and stroke (tens of mm) operation as it is required e.g., for medical implants. The characterisation is based on high precision optical displacement measurements and a force self-sensing approach. An optically measured displacement of 292 nm in lateral direction and 910 nm in vertical direction of the flexural mechanical amplifier has been obtained, corresponding to a deflection attenuation factor of 3.1. Piezoelectric self-sensing of force was used to determine a force amplification factor of 3.43 from the mechanical oval structure.
Y1  - 2022
UR  - https://ieeexplore.ieee.org/document/9899222
SN  - 978-3-8007-5894-4
SB  - 978-3-8007-5894-4
SP  - 274
EP  - 277
S1  - 4
PB  - VDE
ER  -