TY  - RPRT
U1  - Arbeitspapier
A1  - Paknejad, Masih
A1  - Azarhoushang, Bahman
A1  - Zahedi, Ali
A1  - Khakrangin, Mehdi
A1  - Kadivar, Mohammadali
T1  - Investigation of material removal mechanisms of laser-structured Si3N4 via single diamond grit scratching
T2  - Research Square
KW  - Material removal mechanism
KW  - Laser structuring
KW  - Single grit diamond scratching
KW  - Silicon nitride (Si3N4)
KW  - Ultrashort pulse laser
KW  - Preprint
KW  - Online-Ressource
Y1  - 2022
SN  - 2693-5015
SS  - 2693-5015
U6  - https://doi.org/10.21203/rs.3.rs-1974605/v1
DO  - https://doi.org/10.21203/rs.3.rs-1974605/v1
SP  - 25
S1  - 25
ER  -