TY - CPAPER U1 - Konferenzveröffentlichung A1 - Ghadiri Zahrani, Esmaeil A1 - Azarhoushang, Bahman A1 - Wilde, Jürgen A1 - Zahedi, Ali T1 - Ablation characteristics of picosecond laser single point drilling of Si3N4 under dry and water medium T2 - Procedia CIRP KW - Under-water laser-machining KW - Picosecond laser single point ablation KW - Si3N4 KW - Ablation depth KW - Laser focus point Y1 - 2020 SN - 2212-8271 SS - 2212-8271 U6 - https://doi.org/10.1016/j.procir.2020.04.144 DO - https://doi.org/10.1016/j.procir.2020.04.144 VL - 95.2020 SP - 938 EP - 943 ER -