TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Albukhari, Almothana A1 - Mescheder, Ulrich T1 - Investigation of the Dynamics of a 2-DoF Actuation Unit Cell for a Cooperative Electrostatic Actuation System JF - Actuators KW - Cooperative actuators KW - Inchworm motor KW - Electrostatic actuator KW - MEMS KW - FEM Y1 - 2021 UN - https://nbn-resolving.org/urn:nbn:de:bsz:fn1-opus4-76658 SN - 2076-0825 SS - 2076-0825 U6 - https://doi.org/10.3390/act10100276 DO - https://doi.org/10.3390/act10100276 VL - 10.2021 IS - 10 SP - 23 S1 - 23 ER -