TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Westerhausen, Markus
A1  - Martin, Tanja
A1  - Metzger, Michael
A1  - Blendinger, Felix
A1  - Fleischer, Monika
A1  - Hofmann, Boris
A1  - Bucher, Volker
T1  - Passivated electrode side walls by atomic layer deposition on flexible polyimide based samples
JF  - Microelectronic Engineering
KW  - Polyimide
KW  - Atomic layer deposition (ALD)
KW  - Flexible microelectrode arrays (Flex-MEAs)
KW  - Passivation
Y1  - 2020
SN  - 0167-9317
SS  - 0167-9317
U6  - https://doi.org/10.1016/j.mee.2020.111315
DO  - https://doi.org/10.1016/j.mee.2020.111315
VL  - 227.2020
IS  - April Artikel 111315
ER  -