TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Lima, Frederico
A1  - Khazi, Isman M.
A1  - Mescheder, Ulrich
A1  - Tungal, Alok C.
A1  - Muthiah, Uma
T1  - Fabrication of 3D microstructures using grayscale lithography
JF  - Advanced Optical Technologies
KW  - Reactive ion etching
KW  - Photoresist mold
KW  - Microelectroplating
KW  - Laser direct writing
KW  - Grayscale technology
KW  - Grayscale lithography
KW  - 3D structuring
Y1  - 2019
SN  - 2192-8584
SS  - 2192-8584
U6  - https://doi.org/10.1515/aot-2019-0023
DO  - https://doi.org/10.1515/aot-2019-0023
VL  - 8.2019
IS  - 3-4
SP  - 181
EP  - 193
ER  -