TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Kovacs, Andras
A1  - Mescheder, Ulrich
T1  - Thin Photonic Crystals for Optical Characterization of Ultrathin Hafnium Dioxide in Mesoporous Layers
T2  - IEEE Sensors 2018, October 28 - 31, 2018, New Dehli, India, Conference Proceedings
KW  - Photonic  crystal
KW  - ALD
KW  - Ultrathin
KW  - Porous silicon
KW  - Hafnium dioxide
KW  - Optical spectroscopy
Y1  - 2018
SN  - 978-1-5386-4707-3
SB  - 978-1-5386-4707-3
U6  - https://doi.org/10.1109/ICSENS.2018.8589935
DO  - https://doi.org/10.1109/ICSENS.2018.8589935
SP  - 4
S1  - 4
ER  -