TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Majer, S. A1 - Mescheder, Ulrich T1 - Simulation supported design of micromechanical sensors JF - Transactions on the Built Environment Y1 - 1995 UR - https://www.witpress.com/elibrary/wit-transactions-on-the-built-environment/13/10926 SN - 1743-3509 SS - 1743-3509 VL - 12.1995 SP - 9 S1 - 9 ER -