TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Mescheder, Ulrich
A1  - Majer, S.
T1  - Micromechanical inclinometer
JF  - Sensors and Actuators A: Physical
KW  - Inclinometers
KW  - Micromechanics
KW  - Piezoresistance
KW  - Silicon
Y1  - 1997
SN  - 0924-4247
SS  - 0924-4247
U6  - https://doi.org/10.1016/S0924-4247(97)01387-3
DO  - https://doi.org/10.1016/S0924-4247(97)01387-3
VL  - 60.1997
IS  - 1-3
SP  - 134
EP  - 138
ER  -