TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Mescheder, Ulrich
A1  - Alavi, M.
A1  - Hiltmann, K.
A1  - Lietzau, Ch.
A1  - Nachtigall, Christoph
A1  - Sandmaier, H.
T1  - Local laser bonding for low temperature budget
JF  - Sensors and Actuators A: Physical
KW  - Wafer bonding
KW  - Laser micromachining
KW  - Eutectic bonding
Y1  - 2002
SN  - 0924-4247
SS  - 0924-4247
U6  - https://doi.org/10.1016/S0924-4247(01)00871-8
DO  - https://doi.org/10.1016/S0924-4247(01)00871-8
VL  - 97-98.2002
IS  - April
SP  - 422
EP  - 427
ER  -