TY - CHAP U1 - Konferenzveröffentlichung A1 - Herding, Mark A1 - Somogyi, Gergoe A1 - Mescheder, Ulrich A1 - Woias, Peter T1 - A new micromachined optical fiber switch for instrumentation purposes T2 - Proceedings of SPIE: Volume 5455; MEMS, MOEMS, and Micromachining, Photonics Europe, 26-30 April 2004, Strasbourg, France Y1 - 2004 SN - 0-8194-5378-1 SB - 0-8194-5378-1 SP - 10 S1 - 10 ER -