TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Ivanov, Alexey
A1  - Kovacs, Andras
A1  - Mescheder, Ulrich
T1  - High quality 3D shapes by silicon anodization
JF  - physica status solidi (a)
Y1  - 2011
SN  - 1862-6319
SS  - 1862-6319
U6  - https://doi.org/10.1002/pssa.201000163
DO  - https://doi.org/10.1002/pssa.201000163
VL  - 208.2011
IS  - 6
SP  - 1383
EP  - 1388
ER  -