TY - CHAP U1 - Konferenzveröffentlichung A1 - Hildering, S. A1 - Becsi, Laszlo A1 - Engel, U. A1 - Merklein, M. A1 - Mescheder, Ulrich T1 - Experimental investigations on high-precision microcutting of copper foils with microfabricated silicon punches T2 - Proceedings of the 12th international conference of the european society for precision engineering and nanotechnology, June 4th - 7th 2012, Stockholm, Sweden, Volume II Y1 - 2012 SN - 978-0-9566790-0-0 SB - 978-0-9566790-0-0 SP - 177 EP - 180 PB - Euspen CY - Bedford ER -