TY - CHAP U1 - Buchbeitrag A1 - Mescheder, Ulrich T1 - Porous Silicon: Technology and Applications for Micromachining and MEMS BT - Proceedings of the NATO Advanced Study Institute on Smart Sensors and MEMS, Povoa de Varzim, Portugal, 8-19 September 2003 T2 - Smart Sensors and MEMS Y1 - 2003 SN - 1-4020-2928-4 SB - 1-4020-2928-4 SP - 273 EP - 288 PB - Kluwer Academic Publishers CY - Dordrecht ER -