TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Lyubimov, Victor V.
A1  - Volgin, Vladimir M.
A1  - Mescheder, Ulrich
A1  - Gnidina, Inna V.
A1  - Ivanov, Alexey
T1  - Investigation of plastic electrode tools for electrochemical machining of silicon
JF  - Precision Engineering
KW  - Micro electrochemical machining
KW  - Plastic electrode-tool
KW  - Metal coating
KW  - Silicon
Y1  - 2016
SN  - 1873-2372
SS  - 1873-2372
U6  - https://doi.org/10.1016/j.precisioneng.2016.09.017
DO  - https://doi.org/10.1016/j.precisioneng.2016.09.017
VL  - 47.2016
SP  - 546
EP  - 556
ER  -