TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Mescheder, Ulrich
A1  - Khazi, Isman M.
T1  - Corner rounding of sharp silicon punching tool edges by local oxidation of silicon
JF  - Microelectronic Engineering
KW  - Convex and concave corner rounding
KW  - 3D transformation
KW  - Locos
KW  - Bird’s beak
KW  - Micropunching
KW  - Silicon punch tool
Y1  - 2015
SN  - 0167-9317
SS  - 0167-9317
U6  - https://doi.org/10.1016/j.mee.2015.02.033
DO  - https://doi.org/10.1016/j.mee.2015.02.033
VL  - 141.2015
IS  - 2
SP  - 178
EP  - 183
ER  -