@article{LopatoHerbkoGoraetal.2023,
  author    = {Przemyslaw Lopato and Michal Herbko and Paulina Gora and Ulrich Mescheder and Andras Kovacs and Alexander Filbert},
  title     = {Numerical Analysis of the Influence of Fabrication Process Uncertainty on Terahertz Metasurface Quality},
  series   = {Electronics},
  volume    = {12.2023},
  number    = {10},
  issn      = {2079-9292},
  doi       = {10.3390/electronics12102198},
  url       = {https://nbn-resolving.org/urn:nbn:de:bsz:fn1-opus4-95049},
  year      = {2023},
  language  = {en}
}