@techreport{PaknejadAzarhoushangZahedietal., type = {Working Paper}, author = {Masih Paknejad and Bahman Azarhoushang and Ali Zahedi and Mehdi Khakrangin and Mohammadali Kadivar}, title = {Investigation of material removal mechanisms of laser-structured Si3N4 via single diamond grit scratching}, series = {Research Square}, issn = {2693-5015}, doi = {10.21203/rs.3.rs-1974605/v1}, pages = {25}, language = {en} }