@techreport{PaknejadAzarhoushangZahedietal.,
  type      = {Working Paper},
  author    = {Masih Paknejad and Bahman Azarhoushang and Ali Zahedi and Mehdi Khakrangin and Mohammadali Kadivar},
  title     = {Investigation of material removal mechanisms of laser-structured Si3N4 via single diamond grit scratching},
  series    = {Research Square},
  issn      = {2693-5015},
  doi       = {10.21203/rs.3.rs-1974605/v1},
  pages     = {25},
  language  = {en}
}