@inproceedings{Ghadiri ZahraniAzarhoushangWildeetal.2020, author = {Ghadiri Zahrani, Esmaeil and Azarhoushang, Bahman and Wilde, J{\"u}rgen and Zahedi, Ali}, title = {Ablation characteristics of picosecond laser single point drilling of Si3N4 under dry and water medium}, booktitle = {Procedia CIRP}, volume = {95.2020}, issn = {2212-8271}, doi = {10.1016/j.procir.2020.04.144}, pages = {938 -- 943}, year = {2020}, language = {en} }