@inproceedings{GhadiriZahraniAzarhoushangWildeetal.2020,
  author    = {Esmaeil Ghadiri Zahrani and Bahman Azarhoushang and J{\"u}rgen Wilde and Ali Zahedi},
  title     = {Ablation characteristics of picosecond laser single point drilling of Si3N4 under dry and water medium},
  series = {Procedia CIRP},
  volume    = {95.2020},
  issn      = {2212-8271},
  doi       = {10.1016/j.procir.2020.04.144},
  pages     = {938 -- 943},
  year      = {2020},
  language  = {en}
}