@article{SoltaniHojatiDaneshietal.2021,
  author    = {Babak Soltani and Faramarz Hojati and Amir Daneshi and Bahman Azarhoushang},
  title     = {Simulation of the laser-material interaction of ultrashort pulse laser processing of silicon nitride workpieces and the key factors in the ablation process},
  series   = {The International Journal of Advanced Manufacturing Technology},
  volume    = {114.2021},
  number    = {11},
  issn      = {1433-3015},
  doi       = {10.1007/s00170-021-07111-5},
  url       = {https://nbn-resolving.org/urn:nbn:de:bsz:fn1-opus4-77825},
  pages     = {3719 -- 3738},
  year      = {2021},
  language  = {en}
}