@inproceedings{KhaziKovacsMescheder2021,
  author    = {Isman M. Khazi and Andras Kovacs and Ulrich Mescheder},
  title     = {Inductive Transducers with 2D Microcoils in Reflection Differential Transmitter-Receiver Mode for the Micro Non-Destructive Testing of Grinding Burn},
  series = {The 21st International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2021, 20 - 25 June 2021, online virtual conference},
  isbn      = {978-1-6654-1267-4},
  doi       = {10.1109/Transducers50396.2021.9495725},
  pages     = {1202 -- 1205},
  year      = {2021},
  abstract  = {Microfabricated 2D inductive eddy-current transducers operating in a reflection differential transmitter-receiver mode are presented for the micro nondestructive detection of micro grinding burn. 2D spiral circular microcoils are employed as excitation coils, while an innovatively conceptualized “interconnected split-D” type differential microcoil is used as a sensing coil. Finite element modelling using COMSOL revealed the efficacy of proposed concept in non-destructive testing of small grinding burn having a width of 100 µm. The induced sensing coil voltage changed as a function of presence of grinding burn, with successful recording of the signal for the investigated lift-off range of 250 µm - 1000 µm for 100 kHz to 1 MHz driving frequencies of excitation coil. Experimental validation showed a 94\% increase in the induced voltage of the sensing coil in presence of grinding burn on increasing the driving frequency of excitation coil from 100 kHz to 1 MHz. Thereby, revealing the superficial nature of the grinding burn defect, and showing the efficacy of the proposed concept for the non-destructive testing of grinding burn.},
  language  = {en}
}