@article{MeschederLootzeAljasem2021, author = {Ulrich Mescheder and Michael Lootze and Khaled Aljasem}, title = {Evaluation and Optimization of a MOEMS Active Focusing Device}, series = {Micromachines}, volume = {12.2021}, number = {2}, issn = {2072-666X}, doi = {10.3390/mi12020172}, year = {2021}, language = {en} }