@inproceedings{SittkusKovacsMescheder2019, author = {Benjamin Sittkus and Andras Kovacs and Ulrich Mescheder}, title = {Fabrication of a microfluidic system with columnar structures using DRIE for blood brain barrier applications}, series = {MikroSystemTechnik Kongress 2019 : Mikroelektronik | MEMS-MOEMS | Systemintegration – S{\"a}ulen der Digitalisierung und k{\"u}nstlichen Intelligenz 28. – 30. Oktober 2019 in Berlin}, publisher = {VDE Verlag}, address = {Berlin}, isbn = {978-3-8007-5090-0}, pages = {750 -- 753}, year = {2019}, language = {en} }