@phdthesis{Keshavarzi2019,
  author    = {Shervin Keshavarzi},
  title     = {Silicon Needle-like Surfaces for Room Temperature Silicon-Silicon Bonding Applications},
  url       = {https://nbn-resolving.org/urn:nbn:de:bsz:25-freidok-1515955},
  pages     = {220},
  year      = {2019},
  language  = {en}
}