@article{LimaKhaziMeschederetal.2019, author = {Frederico Lima and Isman M. Khazi and Ulrich Mescheder and Alok C. Tungal and Uma Muthiah}, title = {Fabrication of 3D microstructures using grayscale lithography}, series = {Advanced Optical Technologies}, volume = {8.2019}, number = {3-4}, issn = {2192-8584}, doi = {10.1515/aot-2019-0023}, pages = {181 -- 193}, year = {2019}, language = {en} }