@techreport{MeschederKovacsMueller2002, author = {Ulrich Mescheder and Andras Kovacs and Bernhard M{\"u}ller}, title = {Sensorik: Porous Silicon Based Humidity Sensor with Interdigital Electrodes and Internal Heaters}, series = {Forschungsbericht}, year = {2002}, language = {en} }